NAURA Achieves 1,000+ Vertical Furnace Shipments

On January 6, 2025, NAURA's 1,000th vertical furnace was formally delivered. This not only marks the substantial advancement achieved by our vertical furnaces, but also reflects the significant improvement in the manufacturing strength of integrated circuit (IC) equipment in China.

The vertical furnace, as the key equipment for IC manufacturing, is mainly intended for heat treatment processes such as front-end oxidation, diffusion and annealing, and it has a direct effect on the performance of semiconductor devices. Also, the vertical furnace allows for wafer processing in batch and thus improves the production efficiency, demonstrating increasing importance in the current IC manufacturing. According to SEMI data, the global market size of vertical furnace has reached 3.2 billion dollars in 2024, and is expected to keep solid growth in the next few years.

The key to the success of NAURA's vertical furnace lies in its continuous innovation and breakthrough at the technical level. With high-accuracy temperature control, excellent film-forming uniformity and advanced metal and particle contamination control technology, NAURA's vertical furnace has greatly improved the yield of chips. In recent years, NAURA has also developed a range of vertical furnace technologies to further consolidate its technological leadership in the industry. In 2024, NAURA released the plasma-enhanced silicon nitride atomic layer deposition vertical furnace (Model: DEMAX SN302P), which was highly appreciated by its leading clients in the fields of logic and storage. In the same year, NAURA released the gap-filling silicon oxide atomic layer deposition vertical furnace (Model: DEMAX SN302T), which became key equipment for the manufacturing of 3D NAND flash memories. In addition, the 300 mm vertical oxidation furnace (Model: THEORIS X302P), since its entrance into the high-end 3D NAND production line in 2017, has repeatedly won batch orders and become the first choice of customers due to its advanced automation, stability and technical indexes.

Looking ahead, NAURA will adhere to the pioneering and enterprising spirit to navigate and plough the waves in the new journey of IC equipment and salute to the future with outstanding quality.